RT Journal Article T1 Mid-infrared suspended waveguide platform and building blocks A1 Sanchez-Postigo, Alejandro A1 Wanguemert-Perez, Juan Gonzalo A1 Penades, Jordi Soler A1 Ortega-Monux, Alejandro A1 Nedeljkovic, Milos A1 Halir, Robert A1 Mimun, Faysal El Mokhtari A1 Cheng, Yolanda Xu A1 Qu, Zhibo A1 Khokhar, Ali Z. A1 Osman, Ahmed A1 Cao, Wei A1 Littlejohns, Callum G. A1 Cheben, Pavel A1 Mashanovich, Goran Z. A1 Molina-Fernandez, Inigo K1 Subwavelength structures K1 Grating coupler K1 Silicon K1 Principles K1 Photonics K1 Devices AB In this work, the authors present their recent progress in the development of a platform for the mid-infrared wavelength range, based on suspended silicon waveguides with subwavelength metamaterial cladding. The platform has some intrinsic advantages, which make it a very promising candidate for sensing applications in the molecular fingerprint region. Specifically, it can cover the full transparency window of silicon (up to a wavelength of 8 mu m), only requires one lithographic etch-step and can be designed for strong light-matter interaction. Design rules, practical aspects of the fabrication process and experimental results of a complete set of elemental building blocks operating at two very different wavelengths, 3.8 and 7.7 mu m, are discussed. Propagation losses as low as 0.82 dB/cm at lambda(0) = 3.8 mu m and 3.1 dB/cm at lambda(0) = 7.7 mu m are attained for the interconnecting waveguides. PB Inst engineering technology-iet SN 1751-8768 YR 2019 FD 2019-04-01 LK http://hdl.handle.net/10668/18922 UL http://hdl.handle.net/10668/18922 LA en DS RISalud RD Apr 17, 2025