%0 Journal Article
%A Sanchez-Postigo, Alejandro
%A Wanguemert-Perez, Juan Gonzalo
%A Penades, Jordi Soler
%A Ortega-Monux, Alejandro
%A Nedeljkovic, Milos
%A Halir, Robert
%A Mimun, Faysal El Mokhtari
%A Cheng, Yolanda Xu
%A Qu, Zhibo
%A Khokhar, Ali Z.
%A Osman, Ahmed
%A Cao, Wei
%A Littlejohns, Callum G.
%A Cheben, Pavel
%A Mashanovich, Goran Z.
%A Molina-Fernandez, Inigo
%T Mid-infrared suspended waveguide platform and building blocks
%D 2019
%@ 1751-8768
%U http://hdl.handle.net/10668/18922
%X In this work, the authors present their recent progress in the development of a platform for the mid-infrared wavelength range, based on suspended silicon waveguides with subwavelength metamaterial cladding. The platform has some intrinsic advantages, which make it a very promising candidate for sensing applications in the molecular fingerprint region. Specifically, it can cover the full transparency window of silicon (up to a wavelength of 8 mu m), only requires one lithographic etch-step and can be designed for strong light-matter interaction. Design rules, practical aspects of the fabrication process and experimental results of a complete set of elemental building blocks operating at two very different wavelengths, 3.8 and 7.7 mu m, are discussed. Propagation losses as low as 0.82 dB/cm at lambda(0) = 3.8 mu m and 3.1 dB/cm at lambda(0) = 7.7 mu m are attained for the interconnecting waveguides.
%K Subwavelength structures
%K Grating coupler
%K Silicon
%K Principles
%K Photonics
%K Devices
%~