TY - JOUR AU - Penades, J Soler AU - Ortega-Moñux, A AU - Nedeljkovic, M AU - Wangüemert-Pérez, J G AU - Halir, R AU - Khokhar, A Z AU - Alonso-Ramos, C AU - Qu, Z AU - Molina-Fernández, I AU - Cheben, P AU - Mashanovich, G Z PY - 2016 DO - 10.1364/OE.24.022908 UR - https://hdl.handle.net/10668/25286 T2 - Optics express AB - We present several fundamental photonic building blocks based on suspended silicon waveguides supported by a lateral cladding comprising subwavelength grating metamaterial. We discuss the design, fabrication, and characterization of waveguide bends,... LA - en TI - Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding. TY - research article VL - 24 ER -