RT Journal Article T1 Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding. A1 Penades, J Soler A1 Ortega-Moñux, A A1 Nedeljkovic, M A1 Wangüemert-Pérez, J G A1 Halir, R A1 Khokhar, A Z A1 Alonso-Ramos, C A1 Qu, Z A1 Molina-Fernández, I A1 Cheben, P A1 Mashanovich, G Z AB We present several fundamental photonic building blocks based on suspended silicon waveguides supported by a lateral cladding comprising subwavelength grating metamaterial. We discuss the design, fabrication, and characterization of waveguide bends, multimode interference devices and Mach-Zehnder interferometers for the 3715 - 3800 nm wavelength range, demonstrated for the first time in this platform. The waveguide propagation loss of 0.82 dB/cm is reported, some of the lowest loss yet achieved in silicon waveguides for this wavelength range. These results establish a direct path to ultimately extending the operational wavelength range of silicon wire waveguides to the entire transparency window of silicon. YR 2016 FD 2016 LK https://hdl.handle.net/10668/25286 UL https://hdl.handle.net/10668/25286 LA en DS RISalud RD Apr 18, 2025