%0 Journal Article
%A Penades, J Soler
%A Ortega-Moñux, A
%A Nedeljkovic, M
%A Wangüemert-Pérez, J G
%A Halir, R
%A Khokhar, A Z
%A Alonso-Ramos, C
%A Qu, Z
%A Molina-Fernández, I
%A Cheben, P
%A Mashanovich, G Z
%T Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding.
%D 2016
%U https://hdl.handle.net/10668/25286
%X We present several fundamental photonic building blocks based on suspended silicon waveguides supported by a lateral cladding comprising subwavelength grating metamaterial. We discuss the design, fabrication, and characterization of waveguide bends, multimode interference devices and Mach-Zehnder interferometers for the 3715 - 3800 nm wavelength range, demonstrated for the first time in this platform. The waveguide propagation loss of 0.82 dB/cm is reported, some of the lowest loss yet achieved in silicon waveguides for this wavelength range. These results establish a direct path to ultimately extending the operational wavelength range of silicon wire waveguides to the entire transparency window of silicon.
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