RT Journal Article
T1 Suspended silicon waveguides for long-wave infrared wavelengths.
A1 Penadés, J Soler
A1 Sánchez-Postigo, A
A1 Nedeljkovic, M
A1 Ortega-Moñux, A
A1 Wangüemert-Pérez, J G
A1 Xu, Y
A1 Halir, R
A1 Qu, Z
A1 Khokhar, A Z
A1 Osman, A
A1 Cao, W
A1 Littlejohns, C G
A1 Cheben, P
A1 Molina-Fernández, I
A1 Mashanovich, G Z
AB In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3  dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.
YR 2018
FD 2018
LK http://hdl.handle.net/10668/12136
UL http://hdl.handle.net/10668/12136
LA en
DS RISalud
RD Apr 3, 2025