%0 Journal Article
%A Penadés, J Soler
%A Sánchez-Postigo, A
%A Nedeljkovic, M
%A Ortega-Moñux, A
%A Wangüemert-Pérez, J G
%A Xu, Y
%A Halir, R
%A Qu, Z
%A Khokhar, A Z
%A Osman, A
%A Cao, W
%A Littlejohns, C G
%A Cheben, P
%A Molina-Fernández, I
%A Mashanovich, G Z
%T Suspended silicon waveguides for long-wave infrared wavelengths.
%D 2018
%U http://hdl.handle.net/10668/12136
%X In this Letter, we report suspended silicon waveguides operating at a wavelength of 7.67 μm with a propagation loss of 3.1±0.3  dB/cm. To our knowledge, this is the first demonstration of low-loss silicon waveguides at such a long wavelength, with loss comparable to other platforms that use more exotic materials. The suspended Si waveguide core is supported by a sub-wavelength grating that provides lateral optical confinement while also allowing access to the buried oxide layer so that it can be wet etched using hydrofluoric acid. We also demonstrate low-loss waveguide bends and s-bends.
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