RT Journal Article T1 Suspended germanium waveguides with subwavelength-grating metamaterial cladding for the mid-infrared band. A1 Sánchez-Postigo, Alejandro A1 Ortega-Moñux, Alejandro A1 Soler Penadés, Jordi A1 Osman, Ahmed A1 Nedeljkovic, Milos A1 Qu, Zhibo A1 Wu, Yangbo A1 Molina-Fernández, Íñigo A1 Cheben, Pavel A1 Mashanovich, Goran Z A1 Wangüemert-Pérez, J Gonzalo AB In recent years, sensing and communication applications have fueled important developments of group-IV photonics in the mid-infrared band. In the long-wave range, most platforms are based on germanium, which is transparent up to ∼15-µm wavelength. However, those platforms are limited by the intrinsic losses of complementary materials or require complex fabrication processes. To overcome these limitations, we propose suspended germanium waveguides with a subwavelength metamaterial lateral cladding that simultaneously provides optical confinement and allows structural suspension. These all-germanium waveguides can be fabricated in one dry and one wet etch step. A propagation loss of 5.3 dB/cm is measured at a wavelength of 7.7 µm. These results open the door for the development of integrated devices that can be fabricated in a simple manner and can potentially cover the mid-infrared band up to ∼15 µm. YR 2021 FD 2021 LK http://hdl.handle.net/10668/18030 UL http://hdl.handle.net/10668/18030 LA en DS RISalud RD Apr 12, 2025